7/25/2012	9:24:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	9:24:03 AM	Recipe started at 9:24 AM
7/25/2012	9:24:04 AM	Helium valve closed
7/25/2012	9:24:04 AM	H2 valve closed
7/25/2012	9:24:04 AM	BCl3 valve closed
7/25/2012	9:24:04 AM	PH3 valve closed
7/25/2012	9:24:04 AM	SiCl4 pre valve closed
7/25/2012	9:24:04 AM	SiCl4 post valve closed
7/25/2012	9:24:04 AM	Main Vac valve closed
7/25/2012	9:24:04 AM	Bypass valve closed
7/25/2012	9:24:04 AM	Bubbler valve closed
7/25/2012	9:24:04 AM	Helium MFC set to  0.000000
7/25/2012	9:24:04 AM	H2 MFC set to  0.000000
7/25/2012	9:24:04 AM	BCl3 MFC set to  0.000000
7/25/2012	9:24:04 AM	PH3 MFC set to  0.000000
7/25/2012	9:24:04 AM	SiCl4 MFC set to  0.000000
7/25/2012	9:24:04 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:24:04 AM	Tube furnace set to 0
7/25/2012	9:24:07 AM	H2 valve closed
7/25/2012	9:24:07 AM	BCl3 valve closed
7/25/2012	9:24:07 AM	PH3 valve closed
7/25/2012	9:24:07 AM	SiCl4 pre valve closed
7/25/2012	9:24:07 AM	SiCl4 post valve closed
7/25/2012	9:24:07 AM	Main Vac valve closed
7/25/2012	9:24:07 AM	Bypass valve closed
7/25/2012	9:24:07 AM	Bubbler valve closed
7/25/2012	9:24:07 AM	Helium valve opened
7/25/2012	9:24:07 AM	Helium MFC set to  500.000000
7/25/2012	9:24:07 AM	H2 MFC set to  0.000000
7/25/2012	9:24:07 AM	BCl3 MFC set to  0.000000
7/25/2012	9:24:07 AM	PH3 MFC set to  0.000000
7/25/2012	9:24:07 AM	SiCl4 MFC set to  0.000000
7/25/2012	9:24:07 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:24:07 AM	Tube furnace set to 0
7/25/2012	9:25:19 AM	Helium valve closed
7/25/2012	9:25:19 AM	H2 valve closed
7/25/2012	9:25:19 AM	BCl3 valve closed
7/25/2012	9:25:19 AM	PH3 valve closed
7/25/2012	9:25:19 AM	SiCl4 pre valve closed
7/25/2012	9:25:19 AM	SiCl4 post valve closed
7/25/2012	9:25:19 AM	Main Vac valve closed
7/25/2012	9:25:19 AM	Bypass valve closed
7/25/2012	9:25:19 AM	Bubbler valve closed
7/25/2012	9:25:19 AM	Helium MFC set to  0.000000
7/25/2012	9:25:19 AM	H2 MFC set to  0.000000
7/25/2012	9:25:19 AM	BCl3 MFC set to  0.000000
7/25/2012	9:25:19 AM	PH3 MFC set to  0.000000
7/25/2012	9:25:19 AM	SiCl4 MFC set to  0.000000
7/25/2012	9:25:19 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:25:19 AM	Tube furnace set to 0
7/25/2012	9:25:20 AM	Run finished at 9:25 AM
7/25/2012	9:25:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	9:31:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	9:31:35 AM	Recipe started at 9:31 AM
7/25/2012	9:31:35 AM	Helium valve closed
7/25/2012	9:31:35 AM	H2 valve closed
7/25/2012	9:31:35 AM	BCl3 valve closed
7/25/2012	9:31:35 AM	PH3 valve closed
7/25/2012	9:31:35 AM	SiCl4 pre valve closed
7/25/2012	9:31:35 AM	SiCl4 post valve closed
7/25/2012	9:31:35 AM	Main Vac valve closed
7/25/2012	9:31:35 AM	Bubbler valve closed
7/25/2012	9:31:35 AM	Bypass valve opened
7/25/2012	9:31:35 AM	Helium MFC set to  0.000000
7/25/2012	9:31:35 AM	H2 MFC set to  0.000000
7/25/2012	9:31:35 AM	BCl3 MFC set to  0.000000
7/25/2012	9:31:35 AM	PH3 MFC set to  0.000000
7/25/2012	9:31:35 AM	SiCl4 MFC set to  0.000000
7/25/2012	9:31:35 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:31:35 AM	Tube furnace set to 0
7/25/2012	9:32:52 AM	Helium valve closed
7/25/2012	9:32:52 AM	H2 valve closed
7/25/2012	9:32:52 AM	BCl3 valve closed
7/25/2012	9:32:52 AM	PH3 valve closed
7/25/2012	9:32:52 AM	SiCl4 pre valve closed
7/25/2012	9:32:52 AM	SiCl4 post valve closed
7/25/2012	9:32:52 AM	Main Vac valve closed
7/25/2012	9:32:52 AM	Bubbler valve closed
7/25/2012	9:32:52 AM	Bypass valve opened
7/25/2012	9:32:52 AM	Helium MFC set to  0.000000
7/25/2012	9:32:52 AM	H2 MFC set to  0.000000
7/25/2012	9:32:52 AM	BCl3 MFC set to  0.000000
7/25/2012	9:32:52 AM	PH3 MFC set to  0.000000
7/25/2012	9:32:52 AM	SiCl4 MFC set to  0.000000
7/25/2012	9:32:52 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:32:52 AM	Tube furnace set to 0
7/25/2012	9:33:52 AM	Helium valve closed
7/25/2012	9:33:52 AM	H2 valve closed
7/25/2012	9:33:52 AM	BCl3 valve closed
7/25/2012	9:33:52 AM	PH3 valve closed
7/25/2012	9:33:52 AM	SiCl4 pre valve closed
7/25/2012	9:33:52 AM	SiCl4 post valve closed
7/25/2012	9:33:52 AM	Bypass valve closed
7/25/2012	9:33:52 AM	Bubbler valve closed
7/25/2012	9:33:52 AM	Main Vac valve opened
7/25/2012	9:33:52 AM	Helium MFC set to  0.000000
7/25/2012	9:33:52 AM	H2 MFC set to  0.000000
7/25/2012	9:33:52 AM	BCl3 MFC set to  0.000000
7/25/2012	9:33:52 AM	PH3 MFC set to  0.000000
7/25/2012	9:33:52 AM	SiCl4 MFC set to  0.000000
7/25/2012	9:33:52 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:33:53 AM	Tube furnace set to 0
7/25/2012	9:33:54 AM	Run finished at 9:33 AM
7/25/2012	9:33:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	11:17:19 AM	Main Vac valve closed
7/25/2012	11:17:32 AM	Main Vac valve opened
7/25/2012	11:19:27 AM	Recipe started at 11:19 AM
7/25/2012	11:19:27 AM	Helium valve closed
7/25/2012	11:19:27 AM	H2 valve closed
7/25/2012	11:19:27 AM	BCl3 valve closed
7/25/2012	11:19:27 AM	PH3 valve closed
7/25/2012	11:19:27 AM	SiCl4 pre valve closed
7/25/2012	11:19:27 AM	SiCl4 post valve closed
7/25/2012	11:19:27 AM	Bypass valve closed
7/25/2012	11:19:27 AM	Bubbler valve closed
7/25/2012	11:19:27 AM	Main Vac valve opened
7/25/2012	11:19:27 AM	Helium MFC set to  0.000000
7/25/2012	11:19:27 AM	H2 MFC set to  0.000000
7/25/2012	11:19:27 AM	BCl3 MFC set to  0.000000
7/25/2012	11:19:27 AM	PH3 MFC set to  0.000000
7/25/2012	11:19:27 AM	SiCl4 MFC set to  0.000000
7/25/2012	11:19:27 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	11:19:28 AM	Tube furnace set to 0
7/25/2012	11:19:31 AM	Helium valve closed
7/25/2012	11:19:31 AM	H2 valve closed
7/25/2012	11:19:31 AM	BCl3 valve closed
7/25/2012	11:19:31 AM	PH3 valve closed
7/25/2012	11:19:31 AM	SiCl4 pre valve closed
7/25/2012	11:19:31 AM	SiCl4 post valve closed
7/25/2012	11:19:31 AM	Main Vac valve closed
7/25/2012	11:19:31 AM	Bypass valve closed
7/25/2012	11:19:31 AM	Bubbler valve closed
7/25/2012	11:19:31 AM	Helium MFC set to  0.000000
7/25/2012	11:19:31 AM	H2 MFC set to  0.000000
7/25/2012	11:19:31 AM	BCl3 MFC set to  0.000000
7/25/2012	11:19:31 AM	PH3 MFC set to  0.000000
7/25/2012	11:19:31 AM	SiCl4 MFC set to  0.000000
7/25/2012	11:19:31 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	11:19:31 AM	Tube furnace set to 0
7/25/2012	11:19:34 AM	Helium valve closed
7/25/2012	11:19:34 AM	BCl3 valve closed
7/25/2012	11:19:34 AM	PH3 valve closed
7/25/2012	11:19:34 AM	SiCl4 pre valve closed
7/25/2012	11:19:34 AM	SiCl4 post valve closed
7/25/2012	11:19:34 AM	Main Vac valve closed
7/25/2012	11:19:34 AM	Bypass valve closed
7/25/2012	11:19:34 AM	Bubbler valve closed
7/25/2012	11:19:34 AM	H2 valve opened
7/25/2012	11:19:34 AM	Helium MFC set to  0.000000
7/25/2012	11:19:34 AM	H2 MFC set to  500.000000
7/25/2012	11:19:34 AM	BCl3 MFC set to  0.000000
7/25/2012	11:19:34 AM	PH3 MFC set to  0.000000
7/25/2012	11:19:34 AM	SiCl4 MFC set to  0.000000
7/25/2012	11:19:34 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	11:19:34 AM	Tube furnace set to 0
7/25/2012	11:20:51 AM	Helium valve closed
7/25/2012	11:20:51 AM	BCl3 valve closed
7/25/2012	11:20:51 AM	PH3 valve closed
7/25/2012	11:20:51 AM	SiCl4 pre valve closed
7/25/2012	11:20:51 AM	SiCl4 post valve closed
7/25/2012	11:20:51 AM	Main Vac valve closed
7/25/2012	11:20:51 AM	Bypass valve closed
7/25/2012	11:20:51 AM	H2 valve opened
7/25/2012	11:20:51 AM	Bubbler valve opened
7/25/2012	11:20:51 AM	Helium MFC set to  0.000000
7/25/2012	11:20:51 AM	H2 MFC set to  500.000000
7/25/2012	11:20:51 AM	BCl3 MFC set to  0.000000
7/25/2012	11:20:51 AM	PH3 MFC set to  0.000000
7/25/2012	11:20:51 AM	SiCl4 MFC set to  0.000000
7/25/2012	11:20:51 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	11:20:51 AM	Tube furnace set to 0
7/25/2012	11:20:52 AM	Helium valve closed
7/25/2012	11:20:52 AM	BCl3 valve closed
7/25/2012	11:20:52 AM	PH3 valve closed
7/25/2012	11:20:52 AM	SiCl4 pre valve closed
7/25/2012	11:20:52 AM	SiCl4 post valve closed
7/25/2012	11:20:52 AM	Main Vac valve closed
7/25/2012	11:20:52 AM	Bypass valve closed
7/25/2012	11:20:52 AM	H2 valve opened
7/25/2012	11:20:52 AM	Bubbler valve opened
7/25/2012	11:20:52 AM	Helium MFC set to  0.000000
7/25/2012	11:20:52 AM	H2 MFC set to  500.000000
7/25/2012	11:20:52 AM	BCl3 MFC set to  0.000000
7/25/2012	11:20:52 AM	PH3 MFC set to  0.000000
7/25/2012	11:20:52 AM	SiCl4 MFC set to  0.000000
7/25/2012	11:20:52 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	11:20:52 AM	Tube furnace set to 1000
7/25/2012	11:45:52 AM	Helium valve closed
7/25/2012	11:45:52 AM	PH3 valve closed
7/25/2012	11:45:52 AM	Main Vac valve closed
7/25/2012	11:45:52 AM	Bypass valve closed
7/25/2012	11:45:52 AM	H2 valve opened
7/25/2012	11:45:52 AM	BCl3 valve opened
7/25/2012	11:45:52 AM	SiCl4 pre valve opened
7/25/2012	11:45:52 AM	SiCl4 post valve opened
7/25/2012	11:45:52 AM	Bubbler valve opened
7/25/2012	11:45:52 AM	Helium MFC set to  0.000000
7/25/2012	11:45:52 AM	H2 MFC set to  450.000000
7/25/2012	11:45:52 AM	BCl3 MFC set to  1.000000
7/25/2012	11:45:52 AM	PH3 MFC set to  0.000000
7/25/2012	11:45:52 AM	SiCl4 MFC set to  50.000000
7/25/2012	11:45:52 AM	Bypass solenoid MFC set to  0.000000
7/25/2012	11:45:53 AM	Tube furnace set to 1000
7/25/2012	12:17:23 PM	Helium valve closed
7/25/2012	12:17:23 PM	BCl3 valve closed
7/25/2012	12:17:23 PM	Main Vac valve closed
7/25/2012	12:17:23 PM	Bypass valve closed
7/25/2012	12:17:23 PM	H2 valve opened
7/25/2012	12:17:23 PM	PH3 valve opened
7/25/2012	12:17:23 PM	SiCl4 pre valve opened
7/25/2012	12:17:23 PM	SiCl4 post valve opened
7/25/2012	12:17:23 PM	Bubbler valve opened
7/25/2012	12:17:23 PM	Helium MFC set to  0.000000
7/25/2012	12:17:23 PM	H2 MFC set to  430.000000
7/25/2012	12:17:23 PM	BCl3 MFC set to  0.000000
7/25/2012	12:17:23 PM	PH3 MFC set to  20.000000
7/25/2012	12:17:23 PM	SiCl4 MFC set to  50.000000
7/25/2012	12:17:23 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:17:23 PM	Tube furnace set to 1000
7/25/2012	12:18:53 PM	Helium valve closed
7/25/2012	12:18:53 PM	BCl3 valve closed
7/25/2012	12:18:53 PM	PH3 valve closed
7/25/2012	12:18:53 PM	SiCl4 pre valve closed
7/25/2012	12:18:53 PM	SiCl4 post valve closed
7/25/2012	12:18:53 PM	Main Vac valve closed
7/25/2012	12:18:53 PM	Bypass valve closed
7/25/2012	12:18:53 PM	H2 valve opened
7/25/2012	12:18:53 PM	Bubbler valve opened
7/25/2012	12:18:53 PM	Helium MFC set to  0.000000
7/25/2012	12:18:53 PM	H2 MFC set to  500.000000
7/25/2012	12:18:53 PM	BCl3 MFC set to  0.000000
7/25/2012	12:18:53 PM	PH3 MFC set to  0.000000
7/25/2012	12:18:53 PM	SiCl4 MFC set to  0.000000
7/25/2012	12:18:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:18:53 PM	Tube furnace set to 750
7/25/2012	12:33:53 PM	H2 valve closed
7/25/2012	12:33:53 PM	BCl3 valve closed
7/25/2012	12:33:53 PM	PH3 valve closed
7/25/2012	12:33:53 PM	SiCl4 pre valve closed
7/25/2012	12:33:53 PM	SiCl4 post valve closed
7/25/2012	12:33:53 PM	Main Vac valve closed
7/25/2012	12:33:53 PM	Bypass valve closed
7/25/2012	12:33:53 PM	Helium valve opened
7/25/2012	12:33:53 PM	Bubbler valve opened
7/25/2012	12:33:53 PM	Helium MFC set to  500.000000
7/25/2012	12:33:53 PM	H2 MFC set to  0.000000
7/25/2012	12:33:53 PM	BCl3 MFC set to  0.000000
7/25/2012	12:33:53 PM	PH3 MFC set to  0.000000
7/25/2012	12:33:53 PM	SiCl4 MFC set to  0.000000
7/25/2012	12:33:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:33:53 PM	Tube furnace set to 0
7/25/2012	12:53:53 PM	Helium valve closed
7/25/2012	12:53:53 PM	H2 valve closed
7/25/2012	12:53:53 PM	BCl3 valve closed
7/25/2012	12:53:53 PM	PH3 valve closed
7/25/2012	12:53:53 PM	SiCl4 pre valve closed
7/25/2012	12:53:53 PM	SiCl4 post valve closed
7/25/2012	12:53:53 PM	Main Vac valve closed
7/25/2012	12:53:53 PM	Bypass valve closed
7/25/2012	12:53:53 PM	Bubbler valve closed
7/25/2012	12:53:53 PM	Helium MFC set to  0.000000
7/25/2012	12:53:53 PM	H2 MFC set to  0.000000
7/25/2012	12:53:53 PM	BCl3 MFC set to  0.000000
7/25/2012	12:53:53 PM	PH3 MFC set to  0.000000
7/25/2012	12:53:53 PM	SiCl4 MFC set to  0.000000
7/25/2012	12:53:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:53:54 PM	Tube furnace set to 0
7/25/2012	12:54:56 PM	Helium valve closed
7/25/2012	12:54:56 PM	H2 valve closed
7/25/2012	12:54:56 PM	BCl3 valve closed
7/25/2012	12:54:56 PM	PH3 valve closed
7/25/2012	12:54:56 PM	SiCl4 pre valve closed
7/25/2012	12:54:56 PM	SiCl4 post valve closed
7/25/2012	12:54:56 PM	Main Vac valve closed
7/25/2012	12:54:56 PM	Bubbler valve closed
7/25/2012	12:54:56 PM	Bypass valve opened
7/25/2012	12:54:56 PM	Helium MFC set to  0.000000
7/25/2012	12:54:56 PM	H2 MFC set to  0.000000
7/25/2012	12:54:56 PM	BCl3 MFC set to  0.000000
7/25/2012	12:54:56 PM	PH3 MFC set to  0.000000
7/25/2012	12:54:56 PM	SiCl4 MFC set to  0.000000
7/25/2012	12:54:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:54:56 PM	Tube furnace set to 0
7/25/2012	12:55:55 PM	Helium valve closed
7/25/2012	12:55:55 PM	H2 valve closed
7/25/2012	12:55:55 PM	BCl3 valve closed
7/25/2012	12:55:55 PM	PH3 valve closed
7/25/2012	12:55:55 PM	SiCl4 pre valve closed
7/25/2012	12:55:55 PM	SiCl4 post valve closed
7/25/2012	12:55:55 PM	Main Vac valve closed
7/25/2012	12:55:55 PM	Bubbler valve closed
7/25/2012	12:55:55 PM	Bypass valve opened
7/25/2012	12:55:55 PM	Helium MFC set to  0.000000
7/25/2012	12:55:55 PM	H2 MFC set to  0.000000
7/25/2012	12:55:55 PM	BCl3 MFC set to  0.000000
7/25/2012	12:55:55 PM	PH3 MFC set to  0.000000
7/25/2012	12:55:55 PM	SiCl4 MFC set to  0.000000
7/25/2012	12:55:55 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:55:55 PM	Tube furnace set to 0
7/25/2012	12:56:55 PM	Helium valve closed
7/25/2012	12:56:55 PM	H2 valve closed
7/25/2012	12:56:55 PM	BCl3 valve closed
7/25/2012	12:56:55 PM	PH3 valve closed
7/25/2012	12:56:55 PM	SiCl4 pre valve closed
7/25/2012	12:56:55 PM	SiCl4 post valve closed
7/25/2012	12:56:55 PM	Bypass valve closed
7/25/2012	12:56:55 PM	Bubbler valve closed
7/25/2012	12:56:55 PM	Main Vac valve opened
7/25/2012	12:56:55 PM	Helium MFC set to  0.000000
7/25/2012	12:56:55 PM	H2 MFC set to  0.000000
7/25/2012	12:56:55 PM	BCl3 MFC set to  0.000000
7/25/2012	12:56:55 PM	PH3 MFC set to  0.000000
7/25/2012	12:56:55 PM	SiCl4 MFC set to  0.000000
7/25/2012	12:56:55 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	12:56:55 PM	Tube furnace set to 0
7/25/2012	1:02:26 PM	Run finished at 1:02 PM
7/25/2012	1:02:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	1:02:32 PM	Recipe started at 1:02 PM
7/25/2012	1:02:32 PM	Helium valve closed
7/25/2012	1:02:32 PM	H2 valve closed
7/25/2012	1:02:32 PM	BCl3 valve closed
7/25/2012	1:02:32 PM	PH3 valve closed
7/25/2012	1:02:32 PM	SiCl4 pre valve closed
7/25/2012	1:02:32 PM	SiCl4 post valve closed
7/25/2012	1:02:32 PM	Main Vac valve closed
7/25/2012	1:02:32 PM	Bypass valve closed
7/25/2012	1:02:32 PM	Bubbler valve closed
7/25/2012	1:02:32 PM	Helium MFC set to  0.000000
7/25/2012	1:02:32 PM	H2 MFC set to  0.000000
7/25/2012	1:02:32 PM	BCl3 MFC set to  0.000000
7/25/2012	1:02:32 PM	PH3 MFC set to  0.000000
7/25/2012	1:02:32 PM	SiCl4 MFC set to  0.000000
7/25/2012	1:02:32 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	1:02:32 PM	Tube furnace set to 0
7/25/2012	1:02:35 PM	H2 valve closed
7/25/2012	1:02:35 PM	BCl3 valve closed
7/25/2012	1:02:35 PM	PH3 valve closed
7/25/2012	1:02:35 PM	SiCl4 pre valve closed
7/25/2012	1:02:35 PM	SiCl4 post valve closed
7/25/2012	1:02:35 PM	Main Vac valve closed
7/25/2012	1:02:35 PM	Bypass valve closed
7/25/2012	1:02:35 PM	Bubbler valve closed
7/25/2012	1:02:35 PM	Helium valve opened
7/25/2012	1:02:35 PM	Helium MFC set to  500.000000
7/25/2012	1:02:35 PM	H2 MFC set to  0.000000
7/25/2012	1:02:35 PM	BCl3 MFC set to  0.000000
7/25/2012	1:02:35 PM	PH3 MFC set to  0.000000
7/25/2012	1:02:35 PM	SiCl4 MFC set to  0.000000
7/25/2012	1:02:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	1:02:35 PM	Tube furnace set to 0
7/25/2012	1:03:47 PM	Helium valve closed
7/25/2012	1:03:47 PM	H2 valve closed
7/25/2012	1:03:47 PM	BCl3 valve closed
7/25/2012	1:03:47 PM	PH3 valve closed
7/25/2012	1:03:47 PM	SiCl4 pre valve closed
7/25/2012	1:03:47 PM	SiCl4 post valve closed
7/25/2012	1:03:47 PM	Main Vac valve closed
7/25/2012	1:03:47 PM	Bypass valve closed
7/25/2012	1:03:47 PM	Bubbler valve closed
7/25/2012	1:03:47 PM	Helium MFC set to  0.000000
7/25/2012	1:03:47 PM	H2 MFC set to  0.000000
7/25/2012	1:03:47 PM	BCl3 MFC set to  0.000000
7/25/2012	1:03:47 PM	PH3 MFC set to  0.000000
7/25/2012	1:03:47 PM	SiCl4 MFC set to  0.000000
7/25/2012	1:03:47 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	1:03:47 PM	Tube furnace set to 0
7/25/2012	1:03:48 PM	Run finished at 1:03 PM
7/25/2012	1:03:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	1:08:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	1:08:44 PM	Recipe started at 1:08 PM
7/25/2012	1:08:44 PM	Helium valve closed
7/25/2012	1:08:44 PM	H2 valve closed
7/25/2012	1:08:44 PM	BCl3 valve closed
7/25/2012	1:08:44 PM	PH3 valve closed
7/25/2012	1:08:44 PM	SiCl4 pre valve closed
7/25/2012	1:08:44 PM	SiCl4 post valve closed
7/25/2012	1:08:44 PM	Main Vac valve closed
7/25/2012	1:08:44 PM	Bubbler valve closed
7/25/2012	1:08:44 PM	Bypass valve opened
7/25/2012	1:08:44 PM	Helium MFC set to  0.000000
7/25/2012	1:08:44 PM	H2 MFC set to  0.000000
7/25/2012	1:08:44 PM	BCl3 MFC set to  0.000000
7/25/2012	1:08:44 PM	PH3 MFC set to  0.000000
7/25/2012	1:08:44 PM	SiCl4 MFC set to  0.000000
7/25/2012	1:08:44 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	1:08:44 PM	Tube furnace set to 0
7/25/2012	1:09:59 PM	Helium valve closed
7/25/2012	1:09:59 PM	H2 valve closed
7/25/2012	1:09:59 PM	BCl3 valve closed
7/25/2012	1:09:59 PM	PH3 valve closed
7/25/2012	1:09:59 PM	SiCl4 pre valve closed
7/25/2012	1:09:59 PM	SiCl4 post valve closed
7/25/2012	1:09:59 PM	Main Vac valve closed
7/25/2012	1:09:59 PM	Bubbler valve closed
7/25/2012	1:09:59 PM	Bypass valve opened
7/25/2012	1:09:59 PM	Helium MFC set to  0.000000
7/25/2012	1:09:59 PM	H2 MFC set to  0.000000
7/25/2012	1:09:59 PM	BCl3 MFC set to  0.000000
7/25/2012	1:09:59 PM	PH3 MFC set to  0.000000
7/25/2012	1:09:59 PM	SiCl4 MFC set to  0.000000
7/25/2012	1:09:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	1:09:59 PM	Tube furnace set to 0
7/25/2012	1:10:59 PM	Helium valve closed
7/25/2012	1:10:59 PM	H2 valve closed
7/25/2012	1:10:59 PM	BCl3 valve closed
7/25/2012	1:10:59 PM	PH3 valve closed
7/25/2012	1:10:59 PM	SiCl4 pre valve closed
7/25/2012	1:10:59 PM	SiCl4 post valve closed
7/25/2012	1:10:59 PM	Bypass valve closed
7/25/2012	1:10:59 PM	Bubbler valve closed
7/25/2012	1:10:59 PM	Main Vac valve opened
7/25/2012	1:10:59 PM	Helium MFC set to  0.000000
7/25/2012	1:10:59 PM	H2 MFC set to  0.000000
7/25/2012	1:10:59 PM	BCl3 MFC set to  0.000000
7/25/2012	1:10:59 PM	PH3 MFC set to  0.000000
7/25/2012	1:10:59 PM	SiCl4 MFC set to  0.000000
7/25/2012	1:10:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	1:10:59 PM	Tube furnace set to 0
7/25/2012	1:11:00 PM	Run finished at 1:11 PM
7/25/2012	1:11:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	2:56:59 PM	Main Vac valve closed
7/25/2012	2:57:12 PM	Main Vac valve opened
7/25/2012	2:59:53 PM	Recipe started at 2:59 PM
7/25/2012	2:59:53 PM	Helium valve closed
7/25/2012	2:59:53 PM	H2 valve closed
7/25/2012	2:59:53 PM	BCl3 valve closed
7/25/2012	2:59:53 PM	PH3 valve closed
7/25/2012	2:59:53 PM	SiCl4 pre valve closed
7/25/2012	2:59:54 PM	SiCl4 post valve closed
7/25/2012	2:59:54 PM	Bypass valve closed
7/25/2012	2:59:54 PM	Bubbler valve closed
7/25/2012	2:59:54 PM	Main Vac valve opened
7/25/2012	2:59:54 PM	Helium MFC set to  0.000000
7/25/2012	2:59:54 PM	H2 MFC set to  0.000000
7/25/2012	2:59:54 PM	BCl3 MFC set to  0.000000
7/25/2012	2:59:54 PM	PH3 MFC set to  0.000000
7/25/2012	2:59:54 PM	SiCl4 MFC set to  0.000000
7/25/2012	2:59:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	2:59:54 PM	Tube furnace set to 0
7/25/2012	2:59:57 PM	Helium valve closed
7/25/2012	2:59:57 PM	H2 valve closed
7/25/2012	2:59:57 PM	BCl3 valve closed
7/25/2012	2:59:57 PM	PH3 valve closed
7/25/2012	2:59:57 PM	SiCl4 pre valve closed
7/25/2012	2:59:57 PM	SiCl4 post valve closed
7/25/2012	2:59:57 PM	Main Vac valve closed
7/25/2012	2:59:57 PM	Bypass valve closed
7/25/2012	2:59:57 PM	Bubbler valve closed
7/25/2012	2:59:57 PM	Helium MFC set to  0.000000
7/25/2012	2:59:57 PM	H2 MFC set to  0.000000
7/25/2012	2:59:57 PM	BCl3 MFC set to  0.000000
7/25/2012	2:59:57 PM	PH3 MFC set to  0.000000
7/25/2012	2:59:57 PM	SiCl4 MFC set to  0.000000
7/25/2012	2:59:57 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	2:59:57 PM	Tube furnace set to 0
7/25/2012	3:00:00 PM	Helium valve closed
7/25/2012	3:00:00 PM	BCl3 valve closed
7/25/2012	3:00:00 PM	PH3 valve closed
7/25/2012	3:00:00 PM	SiCl4 pre valve closed
7/25/2012	3:00:00 PM	SiCl4 post valve closed
7/25/2012	3:00:00 PM	Main Vac valve closed
7/25/2012	3:00:00 PM	Bypass valve closed
7/25/2012	3:00:00 PM	Bubbler valve closed
7/25/2012	3:00:00 PM	H2 valve opened
7/25/2012	3:00:00 PM	Helium MFC set to  0.000000
7/25/2012	3:00:00 PM	H2 MFC set to  500.000000
7/25/2012	3:00:00 PM	BCl3 MFC set to  0.000000
7/25/2012	3:00:00 PM	PH3 MFC set to  0.000000
7/25/2012	3:00:00 PM	SiCl4 MFC set to  0.000000
7/25/2012	3:00:00 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	3:00:00 PM	Tube furnace set to 0
7/25/2012	3:01:15 PM	Helium valve closed
7/25/2012	3:01:15 PM	BCl3 valve closed
7/25/2012	3:01:15 PM	PH3 valve closed
7/25/2012	3:01:15 PM	SiCl4 pre valve closed
7/25/2012	3:01:15 PM	SiCl4 post valve closed
7/25/2012	3:01:15 PM	Main Vac valve closed
7/25/2012	3:01:15 PM	Bypass valve closed
7/25/2012	3:01:15 PM	H2 valve opened
7/25/2012	3:01:15 PM	Bubbler valve opened
7/25/2012	3:01:15 PM	Helium MFC set to  0.000000
7/25/2012	3:01:15 PM	H2 MFC set to  500.000000
7/25/2012	3:01:15 PM	BCl3 MFC set to  0.000000
7/25/2012	3:01:15 PM	PH3 MFC set to  0.000000
7/25/2012	3:01:15 PM	SiCl4 MFC set to  0.000000
7/25/2012	3:01:15 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	3:01:15 PM	Tube furnace set to 0
7/25/2012	3:01:16 PM	Helium valve closed
7/25/2012	3:01:16 PM	BCl3 valve closed
7/25/2012	3:01:16 PM	PH3 valve closed
7/25/2012	3:01:16 PM	SiCl4 pre valve closed
7/25/2012	3:01:16 PM	SiCl4 post valve closed
7/25/2012	3:01:16 PM	Main Vac valve closed
7/25/2012	3:01:16 PM	Bypass valve closed
7/25/2012	3:01:16 PM	H2 valve opened
7/25/2012	3:01:16 PM	Bubbler valve opened
7/25/2012	3:01:16 PM	Helium MFC set to  0.000000
7/25/2012	3:01:16 PM	H2 MFC set to  500.000000
7/25/2012	3:01:16 PM	BCl3 MFC set to  0.000000
7/25/2012	3:01:16 PM	PH3 MFC set to  0.000000
7/25/2012	3:01:16 PM	SiCl4 MFC set to  0.000000
7/25/2012	3:01:16 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	3:01:16 PM	Tube furnace set to 1000
7/25/2012	3:26:16 PM	Helium valve closed
7/25/2012	3:26:16 PM	PH3 valve closed
7/25/2012	3:26:16 PM	Main Vac valve closed
7/25/2012	3:26:16 PM	Bypass valve closed
7/25/2012	3:26:16 PM	H2 valve opened
7/25/2012	3:26:16 PM	BCl3 valve opened
7/25/2012	3:26:16 PM	SiCl4 pre valve opened
7/25/2012	3:26:16 PM	SiCl4 post valve opened
7/25/2012	3:26:16 PM	Bubbler valve opened
7/25/2012	3:26:16 PM	Helium MFC set to  0.000000
7/25/2012	3:26:16 PM	H2 MFC set to  450.000000
7/25/2012	3:26:16 PM	BCl3 MFC set to  1.000000
7/25/2012	3:26:16 PM	PH3 MFC set to  0.000000
7/25/2012	3:26:16 PM	SiCl4 MFC set to  50.000000
7/25/2012	3:26:16 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	3:26:17 PM	Tube furnace set to 1000
7/25/2012	3:58:46 PM	Helium valve closed
7/25/2012	3:58:47 PM	BCl3 valve closed
7/25/2012	3:58:47 PM	Main Vac valve closed
7/25/2012	3:58:47 PM	Bypass valve closed
7/25/2012	3:58:47 PM	H2 valve opened
7/25/2012	3:58:47 PM	PH3 valve opened
7/25/2012	3:58:47 PM	SiCl4 pre valve opened
7/25/2012	3:58:47 PM	SiCl4 post valve opened
7/25/2012	3:58:47 PM	Bubbler valve opened
7/25/2012	3:58:47 PM	Helium MFC set to  0.000000
7/25/2012	3:58:47 PM	H2 MFC set to  430.000000
7/25/2012	3:58:47 PM	BCl3 MFC set to  0.000000
7/25/2012	3:58:47 PM	PH3 MFC set to  20.000000
7/25/2012	3:58:47 PM	SiCl4 MFC set to  50.000000
7/25/2012	3:58:47 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	3:58:47 PM	Tube furnace set to 1000
7/25/2012	4:00:17 PM	Helium valve closed
7/25/2012	4:00:17 PM	BCl3 valve closed
7/25/2012	4:00:17 PM	PH3 valve closed
7/25/2012	4:00:17 PM	SiCl4 pre valve closed
7/25/2012	4:00:17 PM	SiCl4 post valve closed
7/25/2012	4:00:17 PM	Main Vac valve closed
7/25/2012	4:00:17 PM	Bypass valve closed
7/25/2012	4:00:17 PM	H2 valve opened
7/25/2012	4:00:17 PM	Bubbler valve opened
7/25/2012	4:00:17 PM	Helium MFC set to  0.000000
7/25/2012	4:00:17 PM	H2 MFC set to  500.000000
7/25/2012	4:00:17 PM	BCl3 MFC set to  0.000000
7/25/2012	4:00:17 PM	PH3 MFC set to  0.000000
7/25/2012	4:00:17 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:00:17 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:00:17 PM	Tube furnace set to 750
7/25/2012	4:15:17 PM	H2 valve closed
7/25/2012	4:15:17 PM	BCl3 valve closed
7/25/2012	4:15:17 PM	PH3 valve closed
7/25/2012	4:15:17 PM	SiCl4 pre valve closed
7/25/2012	4:15:17 PM	SiCl4 post valve closed
7/25/2012	4:15:17 PM	Main Vac valve closed
7/25/2012	4:15:17 PM	Bypass valve closed
7/25/2012	4:15:17 PM	Helium valve opened
7/25/2012	4:15:17 PM	Bubbler valve opened
7/25/2012	4:15:17 PM	Helium MFC set to  500.000000
7/25/2012	4:15:17 PM	H2 MFC set to  0.000000
7/25/2012	4:15:17 PM	BCl3 MFC set to  0.000000
7/25/2012	4:15:17 PM	PH3 MFC set to  0.000000
7/25/2012	4:15:17 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:15:17 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:15:17 PM	Tube furnace set to 0
7/25/2012	4:35:17 PM	Helium valve closed
7/25/2012	4:35:17 PM	H2 valve closed
7/25/2012	4:35:17 PM	BCl3 valve closed
7/25/2012	4:35:17 PM	PH3 valve closed
7/25/2012	4:35:17 PM	SiCl4 pre valve closed
7/25/2012	4:35:17 PM	SiCl4 post valve closed
7/25/2012	4:35:17 PM	Main Vac valve closed
7/25/2012	4:35:17 PM	Bypass valve closed
7/25/2012	4:35:17 PM	Bubbler valve closed
7/25/2012	4:35:17 PM	Helium MFC set to  0.000000
7/25/2012	4:35:17 PM	H2 MFC set to  0.000000
7/25/2012	4:35:17 PM	BCl3 MFC set to  0.000000
7/25/2012	4:35:17 PM	PH3 MFC set to  0.000000
7/25/2012	4:35:17 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:35:17 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:35:17 PM	Tube furnace set to 0
7/25/2012	4:35:23 PM	Helium valve closed
7/25/2012	4:35:23 PM	H2 valve closed
7/25/2012	4:35:23 PM	BCl3 valve closed
7/25/2012	4:35:23 PM	PH3 valve closed
7/25/2012	4:35:23 PM	SiCl4 pre valve closed
7/25/2012	4:35:23 PM	SiCl4 post valve closed
7/25/2012	4:35:23 PM	Main Vac valve closed
7/25/2012	4:35:23 PM	Bubbler valve closed
7/25/2012	4:35:23 PM	Bypass valve opened
7/25/2012	4:35:23 PM	Helium MFC set to  0.000000
7/25/2012	4:35:23 PM	H2 MFC set to  0.000000
7/25/2012	4:35:23 PM	BCl3 MFC set to  0.000000
7/25/2012	4:35:23 PM	PH3 MFC set to  0.000000
7/25/2012	4:35:23 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:35:23 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:35:23 PM	Tube furnace set to 0
7/25/2012	4:36:22 PM	Helium valve closed
7/25/2012	4:36:22 PM	H2 valve closed
7/25/2012	4:36:22 PM	BCl3 valve closed
7/25/2012	4:36:22 PM	PH3 valve closed
7/25/2012	4:36:22 PM	SiCl4 pre valve closed
7/25/2012	4:36:22 PM	SiCl4 post valve closed
7/25/2012	4:36:22 PM	Main Vac valve closed
7/25/2012	4:36:22 PM	Bubbler valve closed
7/25/2012	4:36:22 PM	Bypass valve opened
7/25/2012	4:36:22 PM	Helium MFC set to  0.000000
7/25/2012	4:36:22 PM	H2 MFC set to  0.000000
7/25/2012	4:36:22 PM	BCl3 MFC set to  0.000000
7/25/2012	4:36:22 PM	PH3 MFC set to  0.000000
7/25/2012	4:36:22 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:36:22 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:36:22 PM	Tube furnace set to 0
7/25/2012	4:37:22 PM	Helium valve closed
7/25/2012	4:37:22 PM	H2 valve closed
7/25/2012	4:37:22 PM	BCl3 valve closed
7/25/2012	4:37:22 PM	PH3 valve closed
7/25/2012	4:37:22 PM	SiCl4 pre valve closed
7/25/2012	4:37:22 PM	SiCl4 post valve closed
7/25/2012	4:37:22 PM	Bypass valve closed
7/25/2012	4:37:22 PM	Bubbler valve closed
7/25/2012	4:37:22 PM	Main Vac valve opened
7/25/2012	4:37:22 PM	Helium MFC set to  0.000000
7/25/2012	4:37:22 PM	H2 MFC set to  0.000000
7/25/2012	4:37:22 PM	BCl3 MFC set to  0.000000
7/25/2012	4:37:22 PM	PH3 MFC set to  0.000000
7/25/2012	4:37:22 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:37:22 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:37:23 PM	Tube furnace set to 0
7/25/2012	4:38:20 PM	Run finished at 4:38 PM
7/25/2012	4:38:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	4:38:23 PM	Recipe started at 4:38 PM
7/25/2012	4:38:23 PM	Helium valve closed
7/25/2012	4:38:23 PM	H2 valve closed
7/25/2012	4:38:23 PM	BCl3 valve closed
7/25/2012	4:38:23 PM	PH3 valve closed
7/25/2012	4:38:23 PM	SiCl4 pre valve closed
7/25/2012	4:38:23 PM	SiCl4 post valve closed
7/25/2012	4:38:23 PM	Main Vac valve closed
7/25/2012	4:38:23 PM	Bypass valve closed
7/25/2012	4:38:23 PM	Bubbler valve closed
7/25/2012	4:38:23 PM	Helium MFC set to  0.000000
7/25/2012	4:38:23 PM	H2 MFC set to  0.000000
7/25/2012	4:38:23 PM	BCl3 MFC set to  0.000000
7/25/2012	4:38:23 PM	PH3 MFC set to  0.000000
7/25/2012	4:38:23 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:38:23 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:38:24 PM	Tube furnace set to 0
7/25/2012	4:38:27 PM	H2 valve closed
7/25/2012	4:38:27 PM	BCl3 valve closed
7/25/2012	4:38:27 PM	PH3 valve closed
7/25/2012	4:38:27 PM	SiCl4 pre valve closed
7/25/2012	4:38:27 PM	SiCl4 post valve closed
7/25/2012	4:38:27 PM	Main Vac valve closed
7/25/2012	4:38:27 PM	Bypass valve closed
7/25/2012	4:38:27 PM	Bubbler valve closed
7/25/2012	4:38:27 PM	Helium valve opened
7/25/2012	4:38:27 PM	Helium MFC set to  500.000000
7/25/2012	4:38:27 PM	H2 MFC set to  0.000000
7/25/2012	4:38:27 PM	BCl3 MFC set to  0.000000
7/25/2012	4:38:27 PM	PH3 MFC set to  0.000000
7/25/2012	4:38:27 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:38:27 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:38:27 PM	Tube furnace set to 0
7/25/2012	4:39:38 PM	Helium valve closed
7/25/2012	4:39:38 PM	H2 valve closed
7/25/2012	4:39:38 PM	BCl3 valve closed
7/25/2012	4:39:38 PM	PH3 valve closed
7/25/2012	4:39:38 PM	SiCl4 pre valve closed
7/25/2012	4:39:38 PM	SiCl4 post valve closed
7/25/2012	4:39:38 PM	Main Vac valve closed
7/25/2012	4:39:38 PM	Bypass valve closed
7/25/2012	4:39:38 PM	Bubbler valve closed
7/25/2012	4:39:38 PM	Helium MFC set to  0.000000
7/25/2012	4:39:38 PM	H2 MFC set to  0.000000
7/25/2012	4:39:38 PM	BCl3 MFC set to  0.000000
7/25/2012	4:39:38 PM	PH3 MFC set to  0.000000
7/25/2012	4:39:38 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:39:38 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:39:38 PM	Tube furnace set to 0
7/25/2012	4:39:39 PM	Run finished at 4:39 PM
7/25/2012	4:39:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	4:51:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	4:51:03 PM	Recipe started at 4:51 PM
7/25/2012	4:51:03 PM	Helium valve closed
7/25/2012	4:51:03 PM	H2 valve closed
7/25/2012	4:51:03 PM	BCl3 valve closed
7/25/2012	4:51:03 PM	PH3 valve closed
7/25/2012	4:51:03 PM	SiCl4 pre valve closed
7/25/2012	4:51:03 PM	SiCl4 post valve closed
7/25/2012	4:51:03 PM	Main Vac valve closed
7/25/2012	4:51:03 PM	Bubbler valve closed
7/25/2012	4:51:03 PM	Bypass valve opened
7/25/2012	4:51:03 PM	Helium MFC set to  0.000000
7/25/2012	4:51:03 PM	H2 MFC set to  0.000000
7/25/2012	4:51:03 PM	BCl3 MFC set to  0.000000
7/25/2012	4:51:03 PM	PH3 MFC set to  0.000000
7/25/2012	4:51:03 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:51:03 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:51:03 PM	Tube furnace set to 0
7/25/2012	4:52:25 PM	Helium valve closed
7/25/2012	4:52:25 PM	H2 valve closed
7/25/2012	4:52:25 PM	BCl3 valve closed
7/25/2012	4:52:25 PM	PH3 valve closed
7/25/2012	4:52:25 PM	SiCl4 pre valve closed
7/25/2012	4:52:25 PM	SiCl4 post valve closed
7/25/2012	4:52:25 PM	Main Vac valve closed
7/25/2012	4:52:25 PM	Bubbler valve closed
7/25/2012	4:52:25 PM	Bypass valve opened
7/25/2012	4:52:25 PM	Helium MFC set to  0.000000
7/25/2012	4:52:25 PM	H2 MFC set to  0.000000
7/25/2012	4:52:25 PM	BCl3 MFC set to  0.000000
7/25/2012	4:52:25 PM	PH3 MFC set to  0.000000
7/25/2012	4:52:25 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:52:25 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:52:25 PM	Tube furnace set to 0
7/25/2012	4:53:25 PM	Helium valve closed
7/25/2012	4:53:25 PM	H2 valve closed
7/25/2012	4:53:25 PM	BCl3 valve closed
7/25/2012	4:53:25 PM	PH3 valve closed
7/25/2012	4:53:25 PM	SiCl4 pre valve closed
7/25/2012	4:53:25 PM	SiCl4 post valve closed
7/25/2012	4:53:25 PM	Bypass valve closed
7/25/2012	4:53:25 PM	Bubbler valve closed
7/25/2012	4:53:25 PM	Main Vac valve opened
7/25/2012	4:53:25 PM	Helium MFC set to  0.000000
7/25/2012	4:53:25 PM	H2 MFC set to  0.000000
7/25/2012	4:53:25 PM	BCl3 MFC set to  0.000000
7/25/2012	4:53:25 PM	PH3 MFC set to  0.000000
7/25/2012	4:53:25 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:53:25 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:53:26 PM	Tube furnace set to 0
7/25/2012	4:53:27 PM	Run finished at 4:53 PM
7/25/2012	4:53:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	4:56:39 PM	Recipe started at 4:56 PM
7/25/2012	4:56:39 PM	Helium valve closed
7/25/2012	4:56:39 PM	H2 valve closed
7/25/2012	4:56:39 PM	BCl3 valve closed
7/25/2012	4:56:39 PM	PH3 valve closed
7/25/2012	4:56:39 PM	SiCl4 pre valve closed
7/25/2012	4:56:39 PM	SiCl4 post valve closed
7/25/2012	4:56:39 PM	Bypass valve closed
7/25/2012	4:56:39 PM	Bubbler valve closed
7/25/2012	4:56:39 PM	Main Vac valve opened
7/25/2012	4:56:39 PM	Helium MFC set to  0.000000
7/25/2012	4:56:39 PM	H2 MFC set to  0.000000
7/25/2012	4:56:39 PM	BCl3 MFC set to  0.000000
7/25/2012	4:56:39 PM	PH3 MFC set to  0.000000
7/25/2012	4:56:39 PM	SiCl4 MFC set to  0.000000
7/25/2012	4:56:39 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	4:56:39 PM	Tube furnace set to 0
7/25/2012	6:56:39 PM	Helium valve closed
7/25/2012	6:56:39 PM	H2 valve closed
7/25/2012	6:56:39 PM	BCl3 valve closed
7/25/2012	6:56:39 PM	PH3 valve closed
7/25/2012	6:56:39 PM	SiCl4 pre valve closed
7/25/2012	6:56:39 PM	SiCl4 post valve closed
7/25/2012	6:56:39 PM	Main Vac valve closed
7/25/2012	6:56:39 PM	Bypass valve closed
7/25/2012	6:56:39 PM	Bubbler valve closed
7/25/2012	6:56:39 PM	Helium MFC set to  0.000000
7/25/2012	6:56:39 PM	H2 MFC set to  0.000000
7/25/2012	6:56:39 PM	BCl3 MFC set to  0.000000
7/25/2012	6:56:39 PM	PH3 MFC set to  0.000000
7/25/2012	6:56:39 PM	SiCl4 MFC set to  0.000000
7/25/2012	6:56:39 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	6:56:39 PM	Tube furnace set to 0
7/25/2012	6:56:42 PM	Helium valve closed
7/25/2012	6:56:42 PM	BCl3 valve closed
7/25/2012	6:56:42 PM	PH3 valve closed
7/25/2012	6:56:42 PM	SiCl4 pre valve closed
7/25/2012	6:56:42 PM	SiCl4 post valve closed
7/25/2012	6:56:42 PM	Main Vac valve closed
7/25/2012	6:56:42 PM	Bypass valve closed
7/25/2012	6:56:42 PM	Bubbler valve closed
7/25/2012	6:56:42 PM	H2 valve opened
7/25/2012	6:56:42 PM	Helium MFC set to  0.000000
7/25/2012	6:56:42 PM	H2 MFC set to  500.000000
7/25/2012	6:56:42 PM	BCl3 MFC set to  0.000000
7/25/2012	6:56:42 PM	PH3 MFC set to  0.000000
7/25/2012	6:56:42 PM	SiCl4 MFC set to  0.000000
7/25/2012	6:56:42 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	6:56:43 PM	Tube furnace set to 0
7/25/2012	6:57:57 PM	Helium valve closed
7/25/2012	6:57:57 PM	BCl3 valve closed
7/25/2012	6:57:57 PM	PH3 valve closed
7/25/2012	6:57:57 PM	SiCl4 pre valve closed
7/25/2012	6:57:57 PM	SiCl4 post valve closed
7/25/2012	6:57:57 PM	Main Vac valve closed
7/25/2012	6:57:57 PM	Bypass valve closed
7/25/2012	6:57:57 PM	H2 valve opened
7/25/2012	6:57:57 PM	Bubbler valve opened
7/25/2012	6:57:57 PM	Helium MFC set to  0.000000
7/25/2012	6:57:57 PM	H2 MFC set to  500.000000
7/25/2012	6:57:57 PM	BCl3 MFC set to  0.000000
7/25/2012	6:57:57 PM	PH3 MFC set to  0.000000
7/25/2012	6:57:57 PM	SiCl4 MFC set to  0.000000
7/25/2012	6:57:57 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	6:57:57 PM	Tube furnace set to 0
7/25/2012	6:57:58 PM	Helium valve closed
7/25/2012	6:57:58 PM	BCl3 valve closed
7/25/2012	6:57:58 PM	PH3 valve closed
7/25/2012	6:57:58 PM	SiCl4 pre valve closed
7/25/2012	6:57:58 PM	SiCl4 post valve closed
7/25/2012	6:57:58 PM	Main Vac valve closed
7/25/2012	6:57:58 PM	Bypass valve closed
7/25/2012	6:57:58 PM	H2 valve opened
7/25/2012	6:57:58 PM	Bubbler valve opened
7/25/2012	6:57:58 PM	Helium MFC set to  0.000000
7/25/2012	6:57:58 PM	H2 MFC set to  500.000000
7/25/2012	6:57:58 PM	BCl3 MFC set to  0.000000
7/25/2012	6:57:58 PM	PH3 MFC set to  0.000000
7/25/2012	6:57:58 PM	SiCl4 MFC set to  0.000000
7/25/2012	6:57:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	6:57:59 PM	Tube furnace set to 1000
7/25/2012	7:22:58 PM	Helium valve closed
7/25/2012	7:22:58 PM	PH3 valve closed
7/25/2012	7:22:58 PM	Main Vac valve closed
7/25/2012	7:22:58 PM	Bypass valve closed
7/25/2012	7:22:58 PM	H2 valve opened
7/25/2012	7:22:58 PM	BCl3 valve opened
7/25/2012	7:22:58 PM	SiCl4 pre valve opened
7/25/2012	7:22:59 PM	SiCl4 post valve opened
7/25/2012	7:22:59 PM	Bubbler valve opened
7/25/2012	7:22:59 PM	Helium MFC set to  0.000000
7/25/2012	7:22:59 PM	H2 MFC set to  450.000000
7/25/2012	7:22:59 PM	BCl3 MFC set to  1.000000
7/25/2012	7:22:59 PM	PH3 MFC set to  0.000000
7/25/2012	7:22:59 PM	SiCl4 MFC set to  50.000000
7/25/2012	7:22:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	7:22:59 PM	Tube furnace set to 1000
7/25/2012	7:54:29 PM	Helium valve closed
7/25/2012	7:54:29 PM	BCl3 valve closed
7/25/2012	7:54:29 PM	Main Vac valve closed
7/25/2012	7:54:29 PM	Bypass valve closed
7/25/2012	7:54:29 PM	H2 valve opened
7/25/2012	7:54:29 PM	PH3 valve opened
7/25/2012	7:54:29 PM	SiCl4 pre valve opened
7/25/2012	7:54:29 PM	SiCl4 post valve opened
7/25/2012	7:54:29 PM	Bubbler valve opened
7/25/2012	7:54:29 PM	Helium MFC set to  0.000000
7/25/2012	7:54:29 PM	H2 MFC set to  430.000000
7/25/2012	7:54:29 PM	BCl3 MFC set to  0.000000
7/25/2012	7:54:29 PM	PH3 MFC set to  20.000000
7/25/2012	7:54:29 PM	SiCl4 MFC set to  50.000000
7/25/2012	7:54:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	7:54:29 PM	Tube furnace set to 1000
7/25/2012	7:55:59 PM	Helium valve closed
7/25/2012	7:55:59 PM	BCl3 valve closed
7/25/2012	7:55:59 PM	PH3 valve closed
7/25/2012	7:55:59 PM	SiCl4 pre valve closed
7/25/2012	7:55:59 PM	SiCl4 post valve closed
7/25/2012	7:55:59 PM	Main Vac valve closed
7/25/2012	7:55:59 PM	Bypass valve closed
7/25/2012	7:55:59 PM	H2 valve opened
7/25/2012	7:55:59 PM	Bubbler valve opened
7/25/2012	7:55:59 PM	Helium MFC set to  0.000000
7/25/2012	7:55:59 PM	H2 MFC set to  500.000000
7/25/2012	7:55:59 PM	BCl3 MFC set to  0.000000
7/25/2012	7:55:59 PM	PH3 MFC set to  0.000000
7/25/2012	7:55:59 PM	SiCl4 MFC set to  0.000000
7/25/2012	7:55:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	7:55:59 PM	Tube furnace set to 750
7/25/2012	8:10:59 PM	H2 valve closed
7/25/2012	8:10:59 PM	BCl3 valve closed
7/25/2012	8:10:59 PM	PH3 valve closed
7/25/2012	8:10:59 PM	SiCl4 pre valve closed
7/25/2012	8:10:59 PM	SiCl4 post valve closed
7/25/2012	8:10:59 PM	Main Vac valve closed
7/25/2012	8:10:59 PM	Bypass valve closed
7/25/2012	8:10:59 PM	Helium valve opened
7/25/2012	8:10:59 PM	Bubbler valve opened
7/25/2012	8:10:59 PM	Helium MFC set to  500.000000
7/25/2012	8:10:59 PM	H2 MFC set to  0.000000
7/25/2012	8:10:59 PM	BCl3 MFC set to  0.000000
7/25/2012	8:10:59 PM	PH3 MFC set to  0.000000
7/25/2012	8:10:59 PM	SiCl4 MFC set to  0.000000
7/25/2012	8:10:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	8:10:59 PM	Tube furnace set to 0
7/25/2012	8:30:59 PM	Helium valve closed
7/25/2012	8:30:59 PM	H2 valve closed
7/25/2012	8:30:59 PM	BCl3 valve closed
7/25/2012	8:30:59 PM	PH3 valve closed
7/25/2012	8:30:59 PM	SiCl4 pre valve closed
7/25/2012	8:30:59 PM	SiCl4 post valve closed
7/25/2012	8:30:59 PM	Main Vac valve closed
7/25/2012	8:30:59 PM	Bypass valve closed
7/25/2012	8:30:59 PM	Bubbler valve closed
7/25/2012	8:30:59 PM	Helium MFC set to  0.000000
7/25/2012	8:30:59 PM	H2 MFC set to  0.000000
7/25/2012	8:30:59 PM	BCl3 MFC set to  0.000000
7/25/2012	8:30:59 PM	PH3 MFC set to  0.000000
7/25/2012	8:30:59 PM	SiCl4 MFC set to  0.000000
7/25/2012	8:30:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	8:30:59 PM	Tube furnace set to 0
7/25/2012	8:50:59 PM	Helium valve closed
7/25/2012	8:50:59 PM	H2 valve closed
7/25/2012	8:50:59 PM	BCl3 valve closed
7/25/2012	8:51:00 PM	PH3 valve closed
7/25/2012	8:51:00 PM	SiCl4 pre valve closed
7/25/2012	8:51:00 PM	SiCl4 post valve closed
7/25/2012	8:51:00 PM	Main Vac valve closed
7/25/2012	8:51:00 PM	Bubbler valve closed
7/25/2012	8:51:00 PM	Bypass valve opened
7/25/2012	8:51:00 PM	Helium MFC set to  0.000000
7/25/2012	8:51:00 PM	H2 MFC set to  0.000000
7/25/2012	8:51:00 PM	BCl3 MFC set to  0.000000
7/25/2012	8:51:00 PM	PH3 MFC set to  0.000000
7/25/2012	8:51:00 PM	SiCl4 MFC set to  0.000000
7/25/2012	8:51:00 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	8:51:00 PM	Tube furnace set to 0
7/25/2012	8:51:53 PM	Helium valve closed
7/25/2012	8:51:53 PM	H2 valve closed
7/25/2012	8:51:53 PM	BCl3 valve closed
7/25/2012	8:51:53 PM	PH3 valve closed
7/25/2012	8:51:53 PM	SiCl4 pre valve closed
7/25/2012	8:51:53 PM	SiCl4 post valve closed
7/25/2012	8:51:53 PM	Main Vac valve closed
7/25/2012	8:51:53 PM	Bubbler valve closed
7/25/2012	8:51:53 PM	Bypass valve opened
7/25/2012	8:51:53 PM	Helium MFC set to  0.000000
7/25/2012	8:51:53 PM	H2 MFC set to  0.000000
7/25/2012	8:51:53 PM	BCl3 MFC set to  0.000000
7/25/2012	8:51:53 PM	PH3 MFC set to  0.000000
7/25/2012	8:51:53 PM	SiCl4 MFC set to  0.000000
7/25/2012	8:51:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	8:51:53 PM	Tube furnace set to 0
7/25/2012	8:52:53 PM	Helium valve closed
7/25/2012	8:52:53 PM	H2 valve closed
7/25/2012	8:52:53 PM	BCl3 valve closed
7/25/2012	8:52:53 PM	PH3 valve closed
7/25/2012	8:52:53 PM	SiCl4 pre valve closed
7/25/2012	8:52:53 PM	SiCl4 post valve closed
7/25/2012	8:52:53 PM	Bypass valve closed
7/25/2012	8:52:53 PM	Bubbler valve closed
7/25/2012	8:52:53 PM	Main Vac valve opened
7/25/2012	8:52:53 PM	Helium MFC set to  0.000000
7/25/2012	8:52:53 PM	H2 MFC set to  0.000000
7/25/2012	8:52:53 PM	BCl3 MFC set to  0.000000
7/25/2012	8:52:53 PM	PH3 MFC set to  0.000000
7/25/2012	8:52:53 PM	SiCl4 MFC set to  0.000000
7/25/2012	8:52:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	8:52:53 PM	Tube furnace set to 0
7/25/2012	9:06:40 PM	Run finished at 9:06 PM
7/25/2012	9:06:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	9:06:46 PM	Recipe started at 9:06 PM
7/25/2012	9:06:46 PM	Helium valve closed
7/25/2012	9:06:46 PM	H2 valve closed
7/25/2012	9:06:46 PM	BCl3 valve closed
7/25/2012	9:06:46 PM	PH3 valve closed
7/25/2012	9:06:46 PM	SiCl4 pre valve closed
7/25/2012	9:06:46 PM	SiCl4 post valve closed
7/25/2012	9:06:46 PM	Main Vac valve closed
7/25/2012	9:06:46 PM	Bypass valve closed
7/25/2012	9:06:46 PM	Bubbler valve closed
7/25/2012	9:06:46 PM	Helium MFC set to  0.000000
7/25/2012	9:06:46 PM	H2 MFC set to  0.000000
7/25/2012	9:06:46 PM	BCl3 MFC set to  0.000000
7/25/2012	9:06:46 PM	PH3 MFC set to  0.000000
7/25/2012	9:06:46 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:06:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:06:46 PM	Tube furnace set to 0
7/25/2012	9:06:49 PM	H2 valve closed
7/25/2012	9:06:49 PM	BCl3 valve closed
7/25/2012	9:06:49 PM	PH3 valve closed
7/25/2012	9:06:49 PM	SiCl4 pre valve closed
7/25/2012	9:06:49 PM	SiCl4 post valve closed
7/25/2012	9:06:49 PM	Main Vac valve closed
7/25/2012	9:06:49 PM	Bypass valve closed
7/25/2012	9:06:49 PM	Bubbler valve closed
7/25/2012	9:06:49 PM	Helium valve opened
7/25/2012	9:06:49 PM	Helium MFC set to  500.000000
7/25/2012	9:06:49 PM	H2 MFC set to  0.000000
7/25/2012	9:06:49 PM	BCl3 MFC set to  0.000000
7/25/2012	9:06:49 PM	PH3 MFC set to  0.000000
7/25/2012	9:06:49 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:06:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:06:49 PM	Tube furnace set to 0
7/25/2012	9:07:59 PM	Helium valve closed
7/25/2012	9:07:59 PM	H2 valve closed
7/25/2012	9:07:59 PM	BCl3 valve closed
7/25/2012	9:07:59 PM	PH3 valve closed
7/25/2012	9:07:59 PM	SiCl4 pre valve closed
7/25/2012	9:07:59 PM	SiCl4 post valve closed
7/25/2012	9:07:59 PM	Main Vac valve closed
7/25/2012	9:07:59 PM	Bypass valve closed
7/25/2012	9:07:59 PM	Bubbler valve closed
7/25/2012	9:07:59 PM	Helium MFC set to  0.000000
7/25/2012	9:07:59 PM	H2 MFC set to  0.000000
7/25/2012	9:07:59 PM	BCl3 MFC set to  0.000000
7/25/2012	9:07:59 PM	PH3 MFC set to  0.000000
7/25/2012	9:07:59 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:07:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:07:59 PM	Tube furnace set to 0
7/25/2012	9:08:00 PM	Run finished at 9:08 PM
7/25/2012	9:08:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2012	9:12:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	9:12:54 PM	Recipe started at 9:12 PM
7/25/2012	9:12:54 PM	Helium valve closed
7/25/2012	9:12:54 PM	H2 valve closed
7/25/2012	9:12:54 PM	BCl3 valve closed
7/25/2012	9:12:54 PM	PH3 valve closed
7/25/2012	9:12:54 PM	SiCl4 pre valve closed
7/25/2012	9:12:54 PM	SiCl4 post valve closed
7/25/2012	9:12:54 PM	Main Vac valve closed
7/25/2012	9:12:54 PM	Bubbler valve closed
7/25/2012	9:12:54 PM	Bypass valve opened
7/25/2012	9:12:54 PM	Helium MFC set to  0.000000
7/25/2012	9:12:54 PM	H2 MFC set to  0.000000
7/25/2012	9:12:54 PM	BCl3 MFC set to  0.000000
7/25/2012	9:12:54 PM	PH3 MFC set to  0.000000
7/25/2012	9:12:54 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:12:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:12:54 PM	Tube furnace set to 0
7/25/2012	9:14:08 PM	Helium valve closed
7/25/2012	9:14:08 PM	H2 valve closed
7/25/2012	9:14:08 PM	BCl3 valve closed
7/25/2012	9:14:08 PM	PH3 valve closed
7/25/2012	9:14:08 PM	SiCl4 pre valve closed
7/25/2012	9:14:08 PM	SiCl4 post valve closed
7/25/2012	9:14:08 PM	Main Vac valve closed
7/25/2012	9:14:08 PM	Bubbler valve closed
7/25/2012	9:14:08 PM	Bypass valve opened
7/25/2012	9:14:08 PM	Helium MFC set to  0.000000
7/25/2012	9:14:08 PM	H2 MFC set to  0.000000
7/25/2012	9:14:08 PM	BCl3 MFC set to  0.000000
7/25/2012	9:14:08 PM	PH3 MFC set to  0.000000
7/25/2012	9:14:08 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:14:08 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:14:08 PM	Tube furnace set to 0
7/25/2012	9:15:08 PM	Helium valve closed
7/25/2012	9:15:08 PM	H2 valve closed
7/25/2012	9:15:08 PM	BCl3 valve closed
7/25/2012	9:15:08 PM	PH3 valve closed
7/25/2012	9:15:08 PM	SiCl4 pre valve closed
7/25/2012	9:15:08 PM	SiCl4 post valve closed
7/25/2012	9:15:08 PM	Bypass valve closed
7/25/2012	9:15:08 PM	Bubbler valve closed
7/25/2012	9:15:08 PM	Main Vac valve opened
7/25/2012	9:15:08 PM	Helium MFC set to  0.000000
7/25/2012	9:15:08 PM	H2 MFC set to  0.000000
7/25/2012	9:15:08 PM	BCl3 MFC set to  0.000000
7/25/2012	9:15:08 PM	PH3 MFC set to  0.000000
7/25/2012	9:15:08 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:15:08 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:15:08 PM	Tube furnace set to 0
7/25/2012	9:15:09 PM	Run finished at 9:15 PM
7/25/2012	9:15:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2012	9:15:46 PM	Recipe started at 9:15 PM
7/25/2012	9:15:46 PM	Helium valve closed
7/25/2012	9:15:46 PM	H2 valve closed
7/25/2012	9:15:46 PM	BCl3 valve closed
7/25/2012	9:15:46 PM	PH3 valve closed
7/25/2012	9:15:46 PM	SiCl4 pre valve closed
7/25/2012	9:15:46 PM	SiCl4 post valve closed
7/25/2012	9:15:46 PM	Bypass valve closed
7/25/2012	9:15:46 PM	Bubbler valve closed
7/25/2012	9:15:46 PM	Main Vac valve opened
7/25/2012	9:15:46 PM	Helium MFC set to  0.000000
7/25/2012	9:15:46 PM	H2 MFC set to  0.000000
7/25/2012	9:15:46 PM	BCl3 MFC set to  0.000000
7/25/2012	9:15:46 PM	PH3 MFC set to  0.000000
7/25/2012	9:15:46 PM	SiCl4 MFC set to  0.000000
7/25/2012	9:15:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2012	9:15:46 PM	Tube furnace set to 0
